抄録
A normally-off type 5kV class 4H-SiC JFET with low specific on-resistance, called SEJFET (Static Expansion channel JFET), has been fabricated. Its normally-off operation is realized at the temperature from RT to 600K. A very fast switching time of the 4H-SiC SEJFET are realized. The turn-on time at RT is 20ns and the turn-off time at RT is 47ns. In this SEJFET, temperature dependences of the output characteristics and transfer characteristics are evaluated. Its specific on-resistance has a large positive temperature dependence, and its transconductance has a large negative temperature dependence.
