抄録
A power supply to drive a magnetron for a PFC gas resolution has been developed. The power supply (ratings 5kV, 1A) is composed of a full bridge inverter and a voltage doubler rectifier circuit. The characteristics of the current and electric power of a magnetron with the non-linear load were analyzed. As a result, it was found that the magnetron power and the magnetron peak current are approximately linear to the pulse width when the reactor, which controls the current of magnetron, was inserted in the inverter output. We constructed a trial power supply to drive magnetron. It was confirmed that the trial power supply could continuously control the magnetron output up to 3.5kW. The PFC gas resolution efficiency with microwave plasma is larger than the silent discharge method. Therefore we can expect the realization of a small, highly efficient gas resolution device using microwave plasma.
