抄録
This paper presents a novel initial value compensation (IVC) method based on rolling friction characteristics for the precise positioning of linear motor-driven table systems. Rolling friction in mechanism behaves as a nonlinear elastic element in the micro displacement region, and deteriorates the positioning performance with a slow settling response. In order to improve the positioning performance, the overshoot response, which results in the slow settling response, should be suppressed during the positioning. In this study, therefore, IVC based on the specified step settling control framework is employed to achieve the required settling performance without the slow settling response. The effectiveness of the proposed IVC has been verified by experiments performed using a prototype of an industrial positioning device.
