抄録
EMS has the problem that if sufficiently controlled, the unintentional vibration occurs by disturbance. And it has been known the vibration changes with the value of the feedback gain. This study focuses on this phenomenon. The conventional method moved the targeted value of the gap and moved the mover. This method, however, does not fluctuate the target value of the gap and can produce variable vibration including frequency and the amplitude directly. The experimental result shows that gap gain can change the vibration frequency of the target.
