大型超精密位置決めステージのモデルベースト制御技術

抄録

High-precision positioning stages are an important apparatus in the semiconductor and flat panel industries. This paper reviews the model-based control techniques utilized in the feedback and feedforward control of the positioning control system. Multirate feedforward control with preactuation is an exact inversion of the discretized plant and it is effective for the reference tracking performance. Model-based feedback control using multiple sensors enhances the feedback bandwidth and improves the disturbance suppression performance. Additionally, this paper introduces new structures and control techniques achieving lightweight, high-thrust, and low disturbances.