A CVL (Copper Vapor Laser)-MOPA (Master Oscillator Power Amplifier) chain driven by semiconductor pulse generators has been developed.
The CVL-MOPA is composed of a small bore CVL oscillator of good beam quality and three large bore CVL amplifiers driven by semiconductor pulse generators. The semiconductor pulse generator is constructed with 30-series and 100-parallel connection of power MOSFETs and has a maximum rating of 25kV, 2, 000 A. The semiconductor pulse generators reduce the jitter between output lights of amplifier from 8 ns to 2 ns. An output power of 275W is obtained with the CVLMOPA chain driven by the semiconductor pulse generators.
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