抄録
Nowadays, Active Magnetic Bearings (AMBs) are applied to Turbo Molecular Pumps (TMPs) and milling spindles. However, because AMBs require electromagnets and gap sensors, they cost more and need larger equipment than conventional mechanical bearings. Therefore their application is limited. Position Sensorless active Magnetic Bearings (SMBs) are one method to solve such problems and have possibility of higher critical speed because of a shorter rotor. SMBs have already been realized in experimental equipments. Here position sensorless bearings are applied to a TMP and high-speed rotation is realized.
