抄録
Linear encoders are important and indispensable components of linear motor drive systems which have been rapidly introduced into the industry in recent years.
Nowadays the performance of linear motor drive systems is greatly influenced by the performance of linear encoders. This means that linear encoders are important parts to educe high performance of linear motor drive systems. And it is considered that linear encoders should be studied continuously to improve their performance.
In this paper a newly developed linear encoder for linear motors and its utility are introduced. In spite of a small size and a simple structure, this linear encoder is able to combine high resolution with high response and has the capacity of the minimum resolution 0.25μm and the maximum speed 100m/s or more.
