Measurement Standards for Nanometrology

The Journal of The Institute of Electrical Engineers of Japan

Online ISSN : 1881-4190
Print ISSN : 1340-5551
ISSN-L : 1340-5551

SPECIAL ISSUE
Measurement Technology for the Advanced Infrastructure

Measurement Standards for Nanometrology

Isao KOJIMA

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JOURNAL FREE ACCESS

2005 Volume 125 Issue 8 Pages 504-507

DOI https://doi.org/10.1541/ieejjournal.125.504

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© 2005 The Institute of Electrical Engineers of Japan

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