The Journal of The Institute of Electrical Engineers of Japan
Online ISSN : 1881-4190
Print ISSN : 1340-5551
ISSN-L : 1340-5551
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Generation and Application of Atmospheric Pressure Plasma
Materials Processing in Atmospheric Pressure Glow Plasma CVD
Tomohiro NOZAKIKen OKAZAKI
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2006 Volume 126 Issue 12 Pages 788-791

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© 2006 The Institute of Electrical Engineers of Japan
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