The Journal of The Institute of Electrical Engineers of Japan
Online ISSN : 1881-4190
Print ISSN : 1340-5551
ISSN-L : 1340-5551
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Next-Generation Actuators Leading Breakthroughs
Surface Acoustic Wave Motor
Minoru KUROSAWA
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Keywords: MEMS
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2007 Volume 127 Issue 5 Pages 285-287

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© 2007 The Institute of Electrical Engineers of Japan
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