Progress and Outlook of Multilevel Interconnect Technology for Semiconductor Devices

The Journal of The Institute of Electrical Engineers of Japan

Online ISSN : 1881-4190
Print ISSN : 1340-5551
ISSN-L : 1340-5551

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How Small Can We Miniaturize Transistors?

Progress and Outlook of Multilevel Interconnect Technology for Semiconductor Devices

Kazuyoshi UENO

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JOURNAL FREE ACCESS

2008 Volume 128 Issue 3 Pages 157-159

DOI https://doi.org/10.1541/ieejjournal.128.157

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© 2008 The Institute of Electrical Engineers of Japan

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