アモルファス炭素膜の成膜プロセス・表面反応

The Journal of The Institute of Electrical Engineers of Japan

Online ISSN : 1881-4190
Print ISSN : 1340-5551
ISSN-L : 1340-5551

—Is Major Player Only Pencils? Jewels? Future Prospects of Carbon Materials Developed by Plasmas—

Deposition Process and Its Surface Reactions of an Amorphous Carbon Film

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2015 Volume 135 Issue 3 Pages 139-141

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[in Japanese]

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