The Journal of The Institute of Electrical Engineers of Japan
Online ISSN : 1881-4190
Print ISSN : 1340-5551
ISSN-L : 1340-5551
Technical Review
Fine Bubble Technology and its Current Stage of Development
─Semiconductor Cleaning, Wafer Transfer, Plant Factory and Others─
Akira YABE
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2018 Volume 138 Issue 7 Pages 430-434

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[in Japanese]
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© 2018 The Institute of Electrical Engineers of Japan
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