High-efficiency Electrostatic Vibrational MEMS Energy Harvester for IoT Sensors

The Journal of The Institute of Electrical Engineers of Japan

Online ISSN : 1881-4190
Print ISSN : 1340-5551
ISSN-L : 1340-5551

Automated Sensor Setting and Analysis and High Efficient Data Etraction

High-efficiency Electrostatic Vibrational MEMS Energy Harvester for IoT Sensors

Hiroyuki MITSUYA, Hiroshi TOSHIYOSHI

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Keywords: MEMS

JOURNAL RESTRICTED ACCESS

2020 Volume 140 Issue 5 Pages 295-298

DOI https://doi.org/10.1541/ieejjournal.140.295

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[in Japanese]

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© 2020 The Institute of Electrical Engineers of Japan

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