The Journal of The Institute of Electrical Engineers of Japan
Online ISSN : 1881-4190
Print ISSN : 1340-5551
ISSN-L : 1340-5551
SPECIAL ISSUE on Frontier of Piezo Devices Opening Various Applications by New Technology
Development of Piezoelectric MEMS Ultrasonic Sensors and Piezoelectric Thin Film Materials
Tomohiro TERADA
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Keywords: MEMS
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2024 Volume 144 Issue 2 Pages 68-71

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[in Japanese]
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© 2024 The Institute of Electrical Engineers of Japan
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