Micro Device for Local Temperature Control under Microscope

Abstract

The device for controlling the temperature locally under a microscope in a short response time, within 3 seconds, is developed. This device is equipped with a temperature controlling micro heater and a micro thermo sensor patterned on a glass plate which can be used for general biochemical assay. Since this device controls the temperature so locally, the total amount of the heat which is needed for temperature controlling is small enough to avoid the negative effects such as defocusing during observation under a microscope. We established the sensor model to calculate the temperature from the measured resistance value and the initial resistance at the roon temperature. Thus, we can avoid the calibration in each sensor. The rotation velocity change of a single F1 molecule, the rotary biomolecular motor, within short response time is successfully observed by controlling the temperature. This is the result that could not be achieved without MEMS technology. This result also shows the applicability of the device to other temperature controlling biochemical assay.