Analysis of Electric Discharge Phenomenon of Excimer Lamp

Development of the Excimer irradiation divice-The2

Abstract

Excimer Lamp is adopted in the washing process in liquid crystal process.
Excimer lamp the high efficiency and long life are demanded.
Unstable electric discharge causes the efficiency decline. The ultraviolet rays deterioration of quartz cause short life.
The above demand we evaluated the lamp electrode structure and electric discharge analysis of to that are satisfied. The result, lamp structure put quartz with the inside electrode and outside electrode and adopted the one side electric discharge method.
By controlling the inside electrode pitch a stable electric discharge was secured.
We commercialized a long life lamp with high efficiency.