Improvement of illuminance distribution for Excimmered Lamp

Development of Excimer irradiation devece-The3

Abstract

Liquid crystal substrates size is enlarging the size. Accordingly, even the overall length of lamp becomes long. The distribution of ultraviolet rays strength becomes bad, with that the excimer lamp becomes long. Accordingly, we tested the lamp structure of to that does ultraviolet rays distribution evenly. The result, structure established the gap between the electrode of the quartz pipe and outside. By controlling gap we were able to obtain the good lamp of the radiation distribution of the ultraviolet rays of the lamp. The equal ultraviolet rays power distribution were able to be fixed even to a long lamp.