Mechanical and Thermal Properties of Hot-Pressed Compact of Si₃ N₄ Particles Coated with AIN by CVD

抄録

Si₃N₄ fine particles were coated with AN by chemical vapor deposition reaction and then sintered under uniaxial pressure in a hot-press. The effect of coating quantity on the mechanical and thermal properties of composite compact was measured and the data were compared with those for Si₃N₄ itself. As a result, the flexural strength and heat conductivity of the composite samples went through maximum and the Vickers hardness slightly increased with the amount of AlN deposit. It was shown to be possible to obtain composite compacts with mechanical properties exceeding the corresponding properties of sam ples made of uncoated Si₃N₄ particles. The heat conductivity of composite sam ples did not change considerably in comparison with uncoated ones due to low amount of A1N deposit and its non-uniform distribution at high reaction temperature.