Information and Media Technologies
Online ISSN : 1881-0896
ISSN-L : 1881-0896
Hardware and Devices
Low-reflective Wire-grid Polarizers with an Absorptive Layer Formed by Glancing Angle Deposition
Akio TakadaKoji SasakiEiji TakahashiNaoki HanashimaTakatoshi YamadaMotofumi Suzuki
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ジャーナル フリー

2012 年 7 巻 2 号 p. 529-534

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We have developed wire-grid polarizers with low reflectivity in the visible region. The polarizers consist of a bilayered structure of an absorptive layer and a (transparent) gap layer on sub-wavelength pitch gratings made of aluminum. The bilayered structure functions as a highly effective antireflection coating for wire-grid with high reflectance. In order to realize these multilayered wire-grid, the glancing angle deposition technique was used to deposit the absorptive layer just above the Al wire-grid covered with the SiO2 gap layer. Both low reflectance and high transmittance in the desired wavelength range were achieved by optimizing the thickness of each layer.
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© 2012 The Institute of Image Information and Television Engineers
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