ベルト駆動型多関節ロボットの軌道逸脱を低減する目標軌道のウエハ産業用設計事例

抄録

This paper deals with high-speed and high-precision transfer control of silicon wafers by a belt-driven robot. We propose a target trajectory design while we only can change the trajectory due to the industry’s strict development limitations. The proposed trajectory design has a piecewise linear type velocity profile. Gradients of each segment in the piecewise profile, that is acceleration, are designed with a consideration of two factors: The effects of belt elasticity and kinematics between the amount of belt elongation and the amount of tracking error. To reduce the amount of tracking error effectively, we also propose a design indicator which combines the two factors for designing the profile. An experiment with the belt-driven type wafer transfer robot UTM-R3700F, currently in use in industry, illustrates that the proposed trajectory design with the proposed indicator reduces tracking error compared to the conventional trajectory design.