主催: The Institute of Systems, Control and Information Engineers
会議名: 2022国際フレキシブル・オートメーション・シンポジウム
開催地: Hiyoshi Campus, Keio University, Yokohama, Japan
開催日: 2022/07/03 - 2022/07/07
p. 290-297
The volumetric accuracy of a machine tool generally changes with time. Its periodic check, performed at a user's site in a semi-automated manner, can be a key to ensure sufficient volumetric accuracy in a long term. The multilateration measurement, performed by using a tracking interferometer (laser tracker), can measure all the error motions of three linear axes. However, its higher instrumental cost prevents its wider implementation. This paper presents a prototype design of a tracking interferometer with a single rotary axis only. Since higher assembly accuracy is not required, it can be constructed with much lower cost. By using this instrument, a single tracking test is performed with two linear axes, in addition to direct measurement of their linear positioning deviations. An algorithm to identify 2D error motions of the two linear axes is presented. Experimental demonstration is presented to investigate its measurement accuracy.
