PROPOSAL AND FUNDAMENTAL VERIFICATION OF OPTICAL DEPTH MEASUREMENT FOR PERIODIC FINE STRUCTURES

Shotaro Kadoya; Yizhao Guan; Shiwei Ye; Yosho Kanda; Masaki Michihata; Satoru Takahashi

doi:10.11509/isfa.2022.419

2022 International Symposium on Flexible Automation

DOI https://doi.org/10.11509/isfa.2022.419

Conference information

Host: The Institute of Systems, Control and Information Engineers

Name : 2022 International Symposium of Flexible Automation

Location : Hiyoshi Campus, Keio University, Yokohama, Japan

Date : July 03, 2022 - July 07, 2022

PROPOSAL AND FUNDAMENTAL VERIFICATION OF OPTICAL DEPTH MEASUREMENT FOR PERIODIC FINE STRUCTURES

Shotaro Kadoya, Yizhao Guan, Shiwei Ye, Yosho Kanda, Masaki Michihata, Satoru Takahashi

Author information

Keywords: interferometry, depth measurement, in-process measurement, periodic fine structure

CONFERENCE PROCEEDINGS FREE ACCESS

Pages 419-422

Details

Abstract

We proposed a depth measurement method for periodic fine structures. This method could reconstruct the near-field optical phase difference, which corresponded to depth, by considering the contribution to far-field observable light of near-field reflection from surrounding areas. The results indicated that the proposal algorithm could experimentally reconstruct the near-field phase and depth only from the observable far-field information. In addition, the experimental results indicated that the proposal method had a sufficient uniformity and variability for depth measurement.

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