抄録
An optical servo system is a new control system which can be used in hazardous environments where electromagnetic noises and radiations exist. In our previous study, we have realized an opto-pneumatic control system which executed a cart positioning using optical control signals instead of electric signals in ahazardous area. However, the response of the system was slower than a usual electro-pneumatic control system, because the response time of the optical servo valve which converted optical signal to pneumatic fluid power was longer. In the next step, we have proposed an analytical model of the valve in order to improve the dynamics of the valve. In order to design the valve, it is necessary to analyze the characteristics of moving rubber membranes in the valve in detail. In this paper, we propose an analytical model of the membranes. And we investigate the relation between design parameters of the valve, such as an equivalent spring constant, damping coefficient and so on, and structural parameters of the membranes, such as a diameter and thickness.
