2026 Volume 65 Issue 3 Pages 261-268
Recent advances in electron microscopy, X-ray, and optical measurement technologies have enabled the acquisition of high-dimensional, large-scale datasets spanning spatial, energy, and time domains. At the same time, conventional empirical approaches are becoming insufficient for extracting essential physical and chemical insights from such complex data. In this context, metrology informatics has emerged as an important framework for integrating, interpreting, and transforming measurement data into knowledge. This article outlines the concept of metrology informatics and highlights its practical applications, including high-dimensional data decomposition of Scanning Electron Microscopy Cathodoluminescence (SEM-CL) Spectral Imaging (SI), non-rigid registration of Three-Dimensional Atom Probe (3DAP) and Electron Tomography (ET) data, and Vision Transformer (ViT) based identification of X-ray diffraction spectra. The effectiveness of these approaches and future perspectives is also discussed.
