PROCEEDINGS OF THE ITE ANNUAL CONVENTION
Online ISSN : 2424-2292
Print ISSN : 1343-1846
ISSN-L : 1343-1846
1999
Session ID : 12-8
Conference information

12-8 Luminescent properties of epitaxial ZnO thin films Grown on substrate.
A. MiyakeH. KominamiH. TatsuokaH. KuwabaraY. NakanishiY. Hatanaka
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CONFERENCE PROCEEDINGS FREE ACCESS

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Abstract
The Structural and luminescent properties of epitaxial ZnO thin films grown on Si substrate have been investigated. The films showed c-axis orientation and there cristallinity was improved by heat treatment in air. The films annealed at 800℃ in air showed RHEED pattern of epitaxial ZnO and PL with peak at around 375nm.
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© 1999 The Institute of Image Information and Television Engineers
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