Abstract
SrGa_2S_4:Eu thin films were deposited on quartz glass substrates by multi-source deposition method using Sr-metal, Ga_2S_3 and EuCl_3 powders. After deposition, the films were annealed at 800 or 900℃ for 1 hour in H_2S or Ar atmosphere. SrGa_2S_4:Eu thin films were evaluated by its cathodoluminescent spectra, chromaticity, and luminance at low voltage excitation(<5kV).