13-9 Development of an Ultra-Small Silicon Microphopne for Broadcasting

Abstract

Toward an ultra-small high-performance microphone for the next generation, we are studying a condenser silicon microphone. In recent research, we developed a novel dicing technique by which small microphone capsules can be cut out from a silicon wafer in good yield. By using this technique we fabricated a prototype microphone with high sensitivity and a wide frequency range for use in broadcasting.