5-8 Improvement of the light sensitivity of the ultrahigh speed, high sensitivity CCD with a microlens array

Abstract

To achieve the improvement of the light sensitivity, we have developed the microlens array for ultrahigh speed, high sensitivity CCD. We optimized the shape of microlens array with a simulator for this CCD and fabricated the microlens with stamping. Using this microlens, we can elevate the light sensitivity of this CCD approximately twice that of original.