Miniaturization of on-chip antenna for CMOS terahertz imaging

Abstract

We propose a Si-CMOS terahertz image sensor. Our imaging pixel used a microstrip patch antenna for receiving THz waves. However, these antennas’ narrow bandwidth and large ground-plane size cause major problems. We introduce an on-chip folded-slot antenna to solve the problems. As a result, we successfully reduced the size, while keeping an antenna gain of 0 dBi over a broader bandwidth than the previous antenna.