1-inch 256x192 Pixel HARP Image Sensor with Active-matrix HEED

Abstract

We made an active-matrix high-efficiency electron emission device (HEED) that had scanning driver circuits fabricated with conventional MOS planer technology.A 1-in 256x192 pixel image sensor,consisting of the active-matrix HEED and a high-gain avalanche rushing amorphous photoconductor (HARP) target,was fabricated and tested as a step toward the development of ultrahigh-sensitivity compact image sensors with a large number of pixels.The experimental results show that the prototype sensor can be used to obtain clear images even under dark lighting conditions,such as in moonlight,and that the active-matrix HEED is a promising highspeed image pick-up device.