Abstract
A one-inch format 1.5 M pixel Interline Transfer (IT) CCD image sensor has been developed for an HDTV camera system. We focused on two areas to achieve a low smear ratio while maintaining high sensitivity. One is the VCCD device structure. By using the device simulator, we have developed a new impurity profile for the buried P+-layer under the VCCD. The other focus area is the optical structure. Considering the incident angle, we simulated the optical path. This simulation helped us determine the size of an optical shield and an onchip microlens made of a deep-UV resist. We have achieved a sensivity of 80 nA/lx, a maximum charge handling capacity of 1.2×105 electrons, and a smear ratio less than-110 dB. A high-fidelity picture with a horizontal resolution of 820 TV lines has been obtained.
