A 1-in. 2M-Pixel CMD Image Sensor

Abstract

This paper presents the experimental results of a high resolution CMD (Charge Modulation Device) image sensor. This sensor features ultra-low power dissipation and a low smear level.
We designed, fabricated and studied a 2M pixel CMD image sensor. A pixel size of 7.3 μm (H) ×7.6μm (V) was used to obtain a 1-in optical format HDTV image sensor. We achieved a die size of 16.6 mm (H) ×10.7mm (V), even though the clock drivers for the scanners were fabricated in the sensor chip.
The smear level was-123 dB and the power dissipation was 206 mW. The saturation signal current per pixel was 28 μA at an exposure of 76 lx (T_c=5100 K, 1/60s integration). The signal had good linearity of photoconversion characteristics. Furthermore, the image lag was lower than the detectable limit (0.1% of the saturation signal).