テレビジョン学会誌
Online ISSN : 1884-9652
Print ISSN : 0386-6831
ISSN-L : 0386-6831
埋込電極をもった増幅型撮像素子の提案
白木 広光
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ジャーナル フリー

1994 年 48 巻 2 号 p. 200-209

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The proposed structure allows opaque driving electrode to be removed from the cell surface, increasing high quantum efficiency and resulting in higher photo-sensitivity. Mode selection (such as reset, charge storage and readout) can be performed by driving electrodes buried in silicon substrate. Readout signal amplitude, which is the output of a source follower, is determined by the number of signal holes stored in each photodiode. Simulation of a device with 1000×1000 of these cells/cm2 indicated that the sensor could be operated without image lag, blooming and low smear. The simulated photo-sensitivty, cell charge capacity and charge-to-voltage coversion factor were high enough for videocameras.

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