A 1/5-inch 270, 000 pixels FT-CCD Color Image Sensor

Abstract

We developed a 1/5-inch frame transfer CCD color image sensor with 270, 000 pixels. The sensor is a key device of input systems for multimedia equipments such as personal computers, workstations, and write out PDAs. The total number of pixels is 532 (H) × 500 (V), and unit cell size is 5.8 (H) × 4.5 (V) μm². A high sensitivity of 45 mV/1x was achieved in photo-electric conversion efficiency by optimizing the thickness of the membranes, and utilizing thinner polysilicon electrodes and multiple interference. A complementary stripe filter of Ye-G-Cy was used as a color filter. Manufacturing cost has been reduced by using a 20-pin transparent resin mold for packaging.