Optically Readable Bi-material Infrared Detector

Abstract

An optically readable bi-material infrared detector has been developed. In this paper, the basic operating principle of this detector, the structure of the test device, and the optical read-out system are described. The thermal-bending property of the test device is also reported. We measured the infrared responsivity of this detector. A noise equivalent temperature difference (NETD) of 0.25 K was obtained with the test device, which had an element size of 75μm×75 μm.