Antenna-Coupled Microbolometer Array for Far-Infrared Laser Detection

Abstract

One- and two-dimensional slot antenna-coupled microbolometer arrays were fabricated, and the receiving properties for 2.5-THz CH₃OH-laser radiation were measured. The pattern of the fabricated arrays coincided with those of a single-slot antenna-coupled microbolometer, independent of the array number. The detected voltage increased linearly with the number of slots, and the optimum distance between slots was found to be 0.5 λ_d (λ_d is the dielectric wavelength.) in the E-plane and 1.6 λ_d in the H-plane.