ITE Technical Report
Online ISSN : 2424-1970
Print ISSN : 1342-6893
ISSN-L : 1342-6893
21.11
Conference information
A New Method of Evaluating the Performance of SiO_2 Coatings for LCD Usage
Tang AndongShang LupingZhao XiaoweiWang Shimin
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CONFERENCE PROCEEDINGS FREE ACCESS

Pages 85-89

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Abstract
SiO_2 films on glass substrate are widely applied in Liquid Crystal Device (LCD) manufacturing. Based upon the P-etch measurement, the density and the thickness of the SiO_2 films can be measured. The authors propose a simple and fast way to evaluate the performance of SiO_2 coatings for industrial usage.
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© 1997 The Institute of Image Information and Television Engineers
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