Abstract
We propose a novel excimer laser machining using a multiple imaging system employing a holographic optical element (HOE). The HOEs that we used were computer generated phase holograms. We calculated the HOE by with three-step optimization using a direct binary search algorithm. The optimized HOE pattern was 4-level, and the matrix size was 1024×1024 with 1 micron pixels. With the use of this HOE, the 95 holes whose diameter was 0.1 mm were drilled in a 10×10 mm area. The energy availability was 19.4%.
