Abstract
This paper describes a shielded loop probe with multilayer structure for high spatial resolution to measure magnetic fields near a trace on surface of printed circuit boards(PCBs). The probe is fabricated with four layer PCBs. According to replacing a coaxial cable of the conventional probe by a strip line, it can acquire smaller loop size and shorter distance between the probe and the trace in comparison with the conventional probe. The spatial resolution is evaluated by measuring magnetic field distribution above the trace. It is indicated that the probe has over twice spatial resolution than the conventional probe.