Abstract
We have developed new microstrip line type pick up coil and shielded loop type coil, which are planar type pickup coil using by multi layer printed wiring board technique. Magnetic thin film permeability can be measured from 1MHz-3.5GHz range to take into account of electric field and impedance matching. We developed electromagnetic noise mapping system using by shielded loop type coil array. High resolution (0.1mm) and vector detection can be realized.
