Photolithographic Fabrication of an MIM Cathode Array and Color Display Operation

Abstract

An MIM-cathode array is fabricated by photolithography and its color display operation is demonstrated. Surface cleaning with UV-ozone ashing keeps the transfer ratio at 0.2%, which is about the same as that of an MIM-cathode made by the metal-mask method. By combining the MIM-cathode with conventional CRT phosphors (P22), we obtained white luminous efficiency of 8lm/W for the screen at an accelerating voltage, Va=4kV. We also developed a frit-sealed display panel with the MIM-cathode array.