Abstract
Electrochromic(EC)transition metal oxide(WO_3 and NiO)films were prepared by sputtering method, which is introduced further hydrogen into the conventional sputtering atmosphere(Ar/O_2). Degree of redox of EC films thus obtained was controlled by introduced-hydrogen content in the atmosphere. Namely, as-deposited EC films could be fabricated at bleached to colored states. EC phenomena were strongly affected by lattice water and hydroxyl group in EC films. Roles of hydrogen introduced during preparation and injected by electrochemical procedure were discussed by measurements of infrared absorption spectra, coloration efficiency and so on.