Abstract
PMS is consist of LED array, lens, polygon-mirror, and motor. A PMS's light sources is the linear LED array. We have fabricated 400dpi LED array using GaAs/AlGaAs(Al〜0.65)single heterojunction structure. The problem of AlGaAs LED array is among the emitters. Thus, we have performed isolation by RIE(Reactive Ion Etching)and wet etching. RIE experiments were carried out at room temperature and used in mixture of gases under a variety of etching conditions. The n and p ohmic contacts were made with AuGe/Ni/Au and AuZn/Pd/Au, respectively. The AlGaAs LED array showed good quality with low forward turn-on voltages and high brightness.
