ITE Technical Report
Online ISSN : 2424-1970
Print ISSN : 1342-6893
ISSN-L : 1342-6893
23.26
Session ID : IDY99-128
Conference information
Fabrication and estimation of characteristics for Nb-silicide FEAs
Jae Seok ParkSanjo LeeByeong Kwon JuJin JangD. JeonMyung Hwan Oh
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CONFERENCE PROCEEDINGS FREE ACCESS

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Abstract
Electron emission currents and stability in the silicon-tip field emission arrays(FEAs)have bee improved by silicide formation on silicon using Nb(Niobium). The formation of Nb-silicide was confirmed by X-Ray Diffraction(XRD)data. The turn-on voltage of silicon-tip FEAs was decreased from 64 to 47V and the emission current fluctuation was decreased from 5% to 2%.
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© 1999 The Institute of Image Information and Television Engineers
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