ITE Technical Report
Online ISSN : 2424-1970
Print ISSN : 1342-6893
ISSN-L : 1342-6893
23.26
Session ID : IDY99-132
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Laser doping technique for II-VI semiconductors, ZnSe and CdTe
Y. HatanakaT. AokiM. NiraulaY. AokiY. Nakanishi
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CONFERENCE PROCEEDINGS FREE ACCESS

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Abstract
The p-type doping of wide band gap II-VI semiconductors is a key technology for the formation of ohmic contacts with metal electrodes in device fabrication. Using alkaline metal compounds such as Na_2Se or Na_2Te, which contain dopant atoms, laser doping experiments were carried out for ZnSe and CdTe. The influences of laser light treatment on the electrical properties of semiconductors were studied mainly by means of the Hall effect measurements and current-voltage(I-V)characteristics. As a result of p-type doping, the resistivity of ZnSe drastically decreased from 10^5 to 10^2 Ω cm and the value of hole carrier concentration increased up to 4.8 x 10^<19> cm^<-3>. Similarly, for CdTe the resistivity decreased from 10^5 to 10^<-1> Ω cm. Formation of p-type ohmic contact in ZnSe and CdTe diodes was also investigated
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© 1999 The Institute of Image Information and Television Engineers
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