Optical mode conversion induced by magnetostatic surface waves(MSSW)is promising for wide bandwidth optical signal processing at microwave signal frequencies. A multilayered garnet device structure to obtain efficient optical-MSSW interaction in a three-dimensional optical waveguide is proposed and analzed. The optical mode conversion characteristics between the E^z_<pq> and the E^x_<pq> modes supported by the threedimensional optical waveguide are derived. The dependence of the mode coupling coefficient on the waveguide parameters, such as the film thicknesses, wavegtuide width, saturation magnetization, and the MSSW power is also analyzed to enable optimization of device parameters.