Abstract
A novel chemical sensor array is proposed and the prototype one was successively fabricated. On the proposed sensor, a photo sensor and a chemical potential sensor are fused in a same pixel of the sensor arrays to measure a fluorescence and a chemical potential information on the same time, and the sensing part of the photo sensor coincides with that of the chemical potential sensor exactly. The prototype one is fabricated using a CCD process. The principle of the device is based on the charge transfer techniques. The fabricated fused image sensor was able to detect the light power and the chemical potential with one sensing part, and was measured each information without mutual interference.
