ITE Technical Report
Online ISSN : 2424-1970
Print ISSN : 1342-6893
ISSN-L : 1342-6893
32.28
Session ID : MMS2008-47
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Deposition of Granular Tape Media on Moving Substrate by Facing Targets Sputtering
Satoshi MATSUNUMATetsutaro INOUETsugihiro DOIToshimitsu MATSUUAtsuto HASHIMOTOHiroki FUJIURAKenichiro HIRATAShigeki NAKAGAWA
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Abstract
Longitudinal recording media with granular magnetic film were fabricated by Facing targets sputtering (FTS). Effect of moving speed (100 cm/min and 5.8 cm/min) on microstructure of the CoPtCr-SiO_2 granular film was investigated. Moving speed does not affect microstructure of its granular column with average diameter of 8 nm grown by FTS. Straight columnar grain was observed by cross-sectional transmission electron microscopy (TEM). Playback test shows that the sputtered media has 8 dB higher SNR than 0.5 Gb/in^2 class commercial particulate tape media.
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© 2008 The Institute of Image Information and Television Engineers
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